EVATEC AG

CLUSTERLINE

machinery used to fabricate semi-conductors;CLUSTER LINE;

EVATEC

Electronic devices and instruments for regulating, controlling, and monitoring; electronic devices and instruments for the controlling and treatment of surfaces; optical, electric, magnetic, spectroscopic sensors; measuring and control devices, namely, for measuring the growth of layers or the removal of coatings in thin-film processing installations; optical controllers and devices for measuring layer thickness of crystal oscillators, scientific instruments, namely, chip media cleaners for the surface cleaning of electronic components, plasma cleaning units for the pre-treatment of substrates which are to be coated in a vacuum installation or in support of coating processes; laboratory devices and instruments, namely, thin film technology accessories, in particular sputtering cathodes, plasma sources, sputtering targets, sputtering shields, sputtering masks, vacuum coating filaments, vacuum coating shuttles, ceramic crucibles, substrate carriers, and gas introduction systems; computer programs, in particular for regulating, controlling, and monitoring surfaces and surface treatments; vacuum measuring devices; sputtering cathodes; quartz crystals for measuring layer thickness;Machines and machine tools, in particular vacuum treatment installations; vacuum coating facilities and vacuum etching installations; mechanical tools for all types of surface treatment, in particular tools for the physical and chemical cleaning, structuring, or removing of layers and mechanical processing of substrates to be coated in a vacuum installation; plasma and evaporation coating machines for the production of surface layers; coating sources of all kinds, in particular, evaporation sources, electron beam evaporators, ion beam sources, ion beam sputtering sources, PVD, CVD, PECVD sources, cathodic sputtering sources, and plasma spraying sources; vacuum coating installations for manufacturing semiconductors, integrated circuits, collectors; machines for the manufacture of surface coatings by plasma treatment or evaporation of coating materials on instruments of all kinds, in particular on lenses of glasses, contact lenses, mirrors, optical or electrical filters, architectural glass substrates for solar cells or solar cell modules, display substrates or modules, in particular computer screens, illumination layers, organic light-emitting diodes; accessories for vacuum treatment installations, namely, cathodic sputtering cathodes, plasma sources, cathodic sputtering shields, sputtering armor, sputtering masks, evaporation coating filaments for vacuum coating, evaporation coating shuttles, ceramic crucibles, quartz crystals, substrate carriers and gas introduction systems;The word(s) EVATEC has no meaning in a foreign language.;

NANOSMOOTH

Machines for the manufacture or processing of workpieces in the nature of semiconductor products, photovoltaic detectors, solar cells, light-emitting devices such as LED and OLED, and replacement parts therefor; Machines in the nature of vacuum treatment plants for coating, evaporation, plasma treatment and plasma etching, especially vacuum plants for thin-film coating, evaporation, epitaxy and plasma treatment;NANO SMOOTH;Oxides, nitrides, oxinitrides and carbides used as chemical coatings and thin layers applied on glass, semiconductors, metals, ceramics and plastics;Scientific and technological services, namely, research, testing, analysis, design and development of vacuum treatment processes, especially vacuum coating processes such as sputter deposition, chemical gas phase deposition, epitaxy, also with plasma assistance, of semiconductor products, tools, parts and vacuum treatment plants for manufacturing and processing operations;

NANOSMOOTH

Chemical source material for the deposition of thin films upon semiconductor wafers sold incorporated into semiconductors;Machines and equipment for the manufacture or processing of workpieces such as semiconductor products, photovoltaic detectors, solar cells, light-emitting devices, including LEDs and OLEDs, tools and parts, namely, vacuum plasma treatment systems comprised of a high frequency, high voltage generator, controls, and treatment chamber and structural parts therefor for coating, evaporation, plasma treatment and plasma etching, especially for thin-film coating, evaporation, epitaxy and plasma treatment;NANO SMOOTH;Compounds for use in the manufacture of semiconductors, namely, oxides, nitrides, oxinitrides and carbides for coating glass, semiconductors, metal, ceramic and plastic;Scientific services and research work, namely, drafting, design and scientific analysis of vacuum treatment processes, especially vacuum coating processes such as sputter deposition, chemical gas phase deposition, epitaxy, also with plasma assistance, and of semiconductor products, tools, parts and vacuum treatment plants for manufacturing and processing operations;

PLASMABOX

[ Instruments and detectors for electrical, optical and specific characterization of the materials of semiconductor products, photovoltaic detectors, solar cells, flat panel displays and light emitting devices, namely, exposure meters for transmission, absorption and reflection, ammeters, voltmeters and current detectors; apparatus for monitoring production processes and quality of semiconductor products, namely, electrical meters and electronic test instruments for use in functional testing of semiconductor products; photovoltaic detectors, solar cells, flat panel display screens; and light emitting devices, namely, light emitting diodes, light emitting diode displays ];Machines and equipment for the plasma assisted manufacture of, and the plasma treatment of, semiconductor devices, photovoltaic detectors, solar cells, flat panel displays and light emitting devices, LEDs, OLEDs, namely, vacuum treatment machines for plasma assisted deposition, plasma treatment, plasma etching, and vacuum machines for depositing fine films, PECVD and PACVD; vacuum machines for dry etching; plasma treatment machines, and parallel plate plasma reactors;[ Installation at factories of machines and equipment for the plasma assisted manufacture or the plasma treatment of semiconductor devices, photovoltaic detectors, solar cells, flat panel displays and light emitting devices; servicing and repair of the aforementioned machines and equipment ];PLASMA BOX;The word(s) PLASMABOX has no meaning in a foreign language.;[ Scientific services and research services, namely, design, development and analysis of plasma processes, semiconductor products, vacuum treatment installations for plasma assisted production and treatment processes ];

PLASMABOX

Photovoltaic solar modules, panels and generators composed of solar cells, photoelectric converters; photovoltaic meters used in conjunction with modules, cells, panels and generators for processing current;Plasma glow discharge reactors for the production of photovoltaic solar modules, panels, cells; and generators, namely, vacuum deposition machines for depositing thin films, namely, PVD, PECVD and CVD;Installation of plants for the production, maintenance and repair of photovoltaic solar modules, panels, cells and generators; maintenance and repair of photovoltaic solar generators;PLASMA BOX;The word(s) PLASMABOX has no meaning in a foreign language.;Scientific and research services, namely, the development, design and analysis of photovoltaic solar modules, panels, cells and generators; research relating to the depositing of thin films, particularly for semiconductors and conductors; development of photovoltaic solar modules, panels, cells and generators;