VCI NANO TECHNOLOGY

Brand Owner Address Description
VCI NANOTECHNOLOGY SKS Industries, Inc. 1551 N. Burkhart Rd. Howell MI 48855 VCI NANO TECHNOLOGY;Anti-corrosive papers for protection of metal products;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. The present invention relates to a method of forming an insulating film in a semiconductor device. After a mixed gas of alkyl silane gas and N2O gas is supplied into the deposition equipment, a radio frequency power including a short pulse wave for causing incomplete reaction upon a gas phase reaction is applied to generate nano particle. The nano particle is then reacted to oxygen radical to form the insulating film including a plurality of nano voids. A low-dielectric insulating film that can be applied to the nano technology even in the existing LECVD equipment is formed.