SLURRY

Brand Owner (click to sort) Address Description
MEGASHOT CELERITY, INC. 200-C PARKER DRIVE SUITE 600 AUSTIN TX 78729 Slurry, chemical blending and distribution systems for use in the semiconductor industry comprised of valves and sensors sold as a unit for use in the manufacture of semiconductors;
SLURRY SMART Hagler Group Global 3491 Heatherstone Way Martinez GA 30907 SLURRY;Engineering design services; Engineering drawing services; Design of engineering products;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A slurry feeding apparatus includes closed slurry bottle, piping, wet nitrogen generator, wet nitrogen supply pipe, suction and spray nozzles, temperature regulator, flow rate control valves, slurry delivery pump and controller for controlling the operation and flow rate of the slurry delivery pump. While a wafer is being polished by a CMP polisher, the controller continuously operates the pump. On the other hand, while the polisher is idling, the controller starts and stops the pump intermittently at regular intervals. No stirrer like a propeller is inserted into the slurry bottle, but the slurry is stirred up by spraying the slurry through the spray nozzle.