POLARIMETERS

Brand Owner (click to sort) Address Description
AUTOPOL RUDOLPH RESEARCH ANALYTICAL, INC. 55 Newburgh Road Hackettstown NJ 07840 POLARIMETERS;IN THE STATEMENT, COLUMN 1, LINE 1, RUDOLPH RESEARCH SHOULD BE DELETED AND RUDOLPH RESEARCH CORPORATION SHOULD BE INSERTED.;In the statement, column 1, line 1, Rudolph Research should be deleted and Rudolph Research Corporation should be inserted.;
PYXIS Polaris Sensor Technologies, Inc. 200 Clinton Ave., Suite 320 Huntsville AL 35801 Polarimeters;
SPEKKER ADAM HILGER, LIMITED 98 KINGS ROAD, CAMDEN ROAD LONDON, N.W. 1 POLARIMETERS, SPECTROSCOPES, AND COLORIMETERS;
STRAINEYE Luceo Co., Ltd. 30-9, Ohyamakanai-cho, Itabashi-ku Tokyo 173-0024 Japan Polarimeters; Polariscopes;STRAIN EYE;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. A method to monitor the state of polarization incident on a photomask in projection printing is presented. The method includes a series of phase-shifting mask patterns that take advantage of high NA effects to create a signal dependent on only one incident polarization component. The patterns include in two embodiments a Radial Phase Grating (RPG) and Proximity Effect Polarization Analyzers (PEPA). A test reticle design includes multiple polarimeters with an array of pinholes on the backside of the photomask. This technique is able to monitor any arbitrary illumination scheme for a particular tool.