PAD HOLDER FOR FLOOR POLISHING

Brand	Owner	Address	Description
X-FLEX	Pioneer/Eclipse Corporation	Eclipse Road P.O. Box 909 Sparta NC 28675	PAD HOLDER FOR FLOOR POLISHING MACHINES;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A polishing apparatus can detect completion of initialization of a polishing pad quantitatively. The polishing apparatus has a polishing table having a polishing pad attached thereto and a substrate holder configured to bring a surface of a substrate into contact with the polishing pad and press the substrate against the polishing pad. The polishing apparatus also has a drive mechanism operable to drive at least one of the polishing table and the substrate holder so as to provide a relative movement between the polishing pad and the substrate. The polishing apparatus includes a current sensor operable to detect a drive current supplied to the driving mechanism. The polishing apparatus also includes a polishing pad condition detector operable to detect a condition of the polishing pad based on the drive current detected by the current sensor when the dummy substrate is polished by a relative movement between the polishing pad and a dummy substrate held by the substrate holder.