ENLARGER ILLUMINATION APPARATUS NAMELY

Brand Owner Address Description
DIOPTIC VIVITAR CORPORATION Los Angeles CA ENLARGER ILLUMINATION APPARATUS-NAMELY, A COLOR HEAD FOR USE WITH A PHOTOGRAPHIC ENLARGER;
 

Where the owner name is not linked, that owner no longer owns the brand

   
Technical Examples
  1. A method for optimizing the optical transfer of a mask pattern onto a substrate using a lithographic apparatus, the lithographic apparatus including an illuminator configured to illuminate the mask pattern, the method including determining a plurality of illumination arrangements for a pupil plane of the illuminator, each of the plurality of illumination arrangements being determined to improve a respective lithographic performance response parameter when illuminating the mask pattern; and adjusting an intensity of a first illumination arrangement of the plurality of illumination arrangements relative to a second illumination arrangement of the plurality of illumination arrangements, the mask pattern to be illuminated with the first and second illumination arrangements. The mask pattern may be illuminated at least once for each of the first and second illumination arrangements or all at once with at least the first illumination arrangement and the second illumination arrangement.