ECO POWER CLEAN

Brand	Owner	Address	Description
ECOPOWERCLEAN	Arment, Angela	1030 SW Jefferson St. Apt. #638 Portland OR 97201	ECO POWER CLEAN;Non-toxic and environmentally sustainable all purpose cleaners;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A process for reducing the formation of potential device-contaminating particles in a process chamber, particularly an etch chamber or a pre-clean chamber used to pre-clean substrates prior to a PVD or other process. The process chamber conventionally includes multiple antennae, the purpose of which is to conduct bias power from a bias power source to a substrate supported on a pedestal assembly. According to the process of the invention, the antennae are removed from the pedestal assembly. Accordingly, the antennae, no longer present in the chamber during substrate processing, are capable of neither generating potential device-contaminating particles nor causing electrical arcing between the pedestal assembly and the chamber wall or other elements in the process chamber, leading to operational power loss.