COATING COMPOSITIONS FOR SIO COATING

Brand Owner Address Description
OCD TOKYO OHKA KOGYO CO., LTD. 150 Nakamaruko, Nakahara-ku, Kawasaki Kanagawa 211-0012 Japan COATING COMPOSITIONS FOR SIO2 COATING FILM ON SEMICONDUCTOR SILICON;
 

Where the owner name is not linked, that owner no longer owns the brand

    
Technical Examples
  1. In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a polyester resin component. In a further aspect, coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compound. Coating compositions of the invention are particularly useful employed in combination with an overcoated photoresist layer to manufacture integrated circuits.