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ENCODER or ENCODERS
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Technical Examples
- An automatically aligning objective aperture assembly for a CDSEM includes a plate that is moveable in X and Y directions relative to an electron beam generated by the SEM. The plate defines one or more objective apertures. Encoders and motors are provided for affecting movement of the plate in the X and Y directions. An image controller, responsive to an image of a semiconductor wafer feature focused upon by the electron beam, controls the encoders and motors in a manner which affects movement of the plate to automatically align the objective aperture with the electron beam.
- A data format description from which encoders and decoders can be automatically generated. The data format description includes data components that represent a field of the data object as a description of the field and a tag. On decoding, the decoder decodes the field's value and produces an XML element that contains the value and the tag from the data component. On encoding, the encoder uses the tag to locate the XML element and encodes the value in the data object. Also included in the data format description are attributes and control statements An object, its XML representation, and the encoders and decoders may be combined to produce self-describing data objects in which a modification of the XML representation automatically results in a modification of the data object.
- A non-contact linear absolute position sensor includes a first magnetic encoder having n+1 pole pairs, a second magnetic encoder having n pole pairs and located and aligned with the first magnetic encoder so as to cover a linear distance. The magnetic encoders are affixed to a traveling body. Two pairs of Hall Effect sensors are located near each of the first and second magnetic encoders and are configured to generate linear position signals. A processor is provided to process the linear position signals to generate an output signal indicative of a linear absolute position of the traveling body.
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