PRESUME

Brand	Owner	Address	Description
PUROZYME	SHEPARD BROS., INC.	503 South Cypress Street La Habra CA 90631	PRESUME;Cleaner for use on industrial equipment, namely, enzymatic chemical cleaners used on food and beverage industrial equipment, not for medical or pharmaceutical use;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

The present invention relates to a method and apparatus for measuring a three-dimensional profile using a SEM, capable of accurately measuring the three-dimensional profile of even a flat surface or a nearly vertical surface based on the inclination angle dependence of the amount of secondary electron image signal detected by the SEM. Specifically, a tilt image obtaining unit obtains a tilt image (a tilt secondary electron image) I(2) of flat regions a and c1 on a pattern to be measured by using an electron beam incident on the pattern from an observation direction ?(2). Then, profile measuring units presume the slope (or surface inclination angle) at each point on the pattern based on the obtained tilt image and integrate successively each presumed slope value (or surface inclination angle value) to measure three-dimensional profiles S2a and S2c. This arrangement allows a three-dimensional profile to be accurately measured.