PLANAR MAGNETRON CATHODE SPUTTERING SOURCES

Brand	Owner	Address	Description
SCANMAG	BALZERS AKTIENGESELLSCHAFT	FL-9496 Balzers Liechtenstein	planar magnetron cathode sputtering sources and sputtering targets;SCAN MAG;
	Where the owner name is not linked, that owner no longer owns the brand

Technical Examples

A magnetron sputtering electrode for use with a magnetron sputtering device, wherein the magnetron sputtering electrode comprises a cathode body, a drive unit coupled to the cathode body, a target received by the cathode body, and a closed loop magnet arrangement received within a magnet receiving chamber and coupled to the drive unit. The closed loop magnet arrangement is comprised of a plurality of magnets adapted for motion relative to the target by the drive unit, wherein at least one of the plurality of magnets is a profiled magnet having a contoured top portion. A method of improving target utilization in sputtering applications is also disclosed.